Equipment
Insight IS-350
Full Ultrasonic Digital Inspection Systems Insight IS-350
- New low noise linear servo motor conception
- 100mm/sec maximum motor speed
- 0.5um scan axis X resolution
- Dictinct removable fixture of the Emission/Reception transducers
- Active Scan Area: 350mm x 350mm / 0.5µm encoder resolution
- Active Scan Area optimized for wafer inspection 300mm and 2 inspection trays JEDEC standard
- Focus Axis(Z): course 50mm course / 0.5µm resolution
- Axis details:
- X linear servo motor
- Y stepper motor
- Z stepper motor
- Dimensions: 680(W) x 800(D) x 1320(H) mm
